CAS: 19756-04-8; Tetrakis(Dimethylamido)Zirconium(Iv)

该化合物是一种高度活性金属-有机化合物,用作化学蒸汽沉降(CVD)和原子层沉积(ALD)过程的前体,其挥发性和清洁分解路径使其适合于储存高纯度的含有的薄膜,如在半导体和电机应用中至关重要的氧化(ZrO2),该化合物的二甲基离心机有助于低温沉积,提高工艺效率和胶片统一性.

结构式图片

相似化合物

175923-04-3 13801-49-5

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上下游产品

lithium dimethylamide 2)3(Si(SiMe3)3)Zr(NMe2)3(Si(SiMe3)3) water zirconium(IV) chloridezirconium(IV) oxide neopentylzirconium tris(dimethylamide)

合成工艺路线路线简述

    [(Me2N)3Zr(Sibu(T)Ph2)2][zr(Nme2)5Li2(Thf)4] 以 氘代四氢呋喃 用作溶剂,化学反应生成四(二甲氨基)锆
    参考文献:酰胺-甲硅烷基配体交换和第4组酰胺和甲硅烷基复合物之间的平衡.
    标题:酰胺-甲硅烷基配体交换和第4组酰胺和甲硅烷基复合物之间的平衡.
    摘要:发现li(thf)2Sibutph2(2-Li)中的m(nme2)4(m = Zr,1A; Hf,1B)和甲硅烷基阴离子(sibutph2)-(2)经过配体交换得到[m(在thf中的nme2)3(sibutph2)2]-(m = Zr,3A; Hf,3B)和[m(nme2)5]-(m = Zr,4A; Hf,4B).该反应是可逆的,导致平衡:2 1A(或1B)+ 2 2--3A(或3B)+ 4A(或4B).在甲苯中,1A与2的反应生成[(me2N)3Zr(sibutph2)2]-[zr(nme2)5Li2(thf)4] +(5)作为离子对.甲硅烷基阴离子2在可逆反应中选择性攻击(me2N)3Zr-N(sime3)2(6A)中的-N(sime3)2配体,得到3A和[n(sime3)2]-(7):6A + 2 2 <-> 3A +7.还观测到并研究了以下平衡:2M(nme2)4(1A; 1B)+
    Doi:10.1021/ic7010293

    海关参考信息

    专利信息


    专利号:US-6479685-B2
    优先权日:1998-01-09
    标题 :Metallocene catalysts for synthesis of high-melting polyolefin copolymer elastomers
    发明人:WAYMOUTH ROBERT M; KRAVCHENKO RAISA L; MACIEJEWSKI PETOFF JENNIFER; HUNG JOYCE
    权利人:TRUSTEES OF THE LELAND STANDAR
    摘要:Metallocene catalysts having plural coordination geometries for synthesis of high melting polyolefin copolymers suitable as thermoplastic elastomers. The inventive catalysts comprise unbridged, substituted or unsubstituted cyclopentadienyl metallocene catalysts that are capable of inter-converting between states with different polymerization or copolymerization characteristics, which interconversion is controlled by selecting the substituents of the cyclopentadienyl ligands so that the rate of interconversion of the two states is within several orders of magnitude of the rate of formation of a single polymer chain. Where r i >r f the polymer can be characterized as multiblock; where r i
    专利号:US-2008086013-A1
    优先权日:2006-06-15
    标 题:Carbometallation of alkynes and improved synthesis of uniquinones
    发明人:LIPSHUTZ BRUCE H
    权利人:UNIV CALIFORNIA
    摘要:Methods for the carbometallation of alkynes are presented. Those are useful for the synthesis of CoQ 10 and other ubiquinones as well as for the synthesis of ubiquinol analogs.

    专利号:US-2006167289-A1
    优先权日:2003-12-05
    标题 :Practical, cost-effective synthesis of ubiquinones
    发明人:LIPSHUTZ BRUCE H; BERL VOLKER; SCHEIN KARIN; WETTERICH FRANK
    权利人:ZYMES LLC
    摘要:The present invention provides a convergent method for the synthesis of ubiquinones and ubiquinone analogues. Also provided are precursors of ubiquinones and their analogues that are useful in the methods of the invention. The invention further provides an improved method for the carboalumination of alkyne substrates.

    专利号:US-6544657-B1
    优先权日:1999-10-12
    标题 :Synthesis of oligosilazane-containing compounds for the production of a ceramic-like material
    发明人:MOTZ GUNTER; STENZEL FRAUKE; ZIEGLER GUNTER
    权利人:FED STATE OF BAVARIA GERMANY A
    摘要:The invention concerns a synthesis method for an oligosilazane-containing condensation product comprising the following step: n conversion of oligosilazane composition with an average molecular weight of no more than 1000 g/mol, n with a dialk(en)ylamino compound of the following formula (I) n n n A[N(R 4 ) 2 ] m   (I) n n n in which A is at least one element chosen from B, Al, Ti, Zr, and Hf, R 4 is an alkyl group or alkenyl group and m is the valence of element A, n in which the reaction is run so that an average of 1.6-2.2 mol HN(R 4 ) 2 per mol of dialk(en)ylamino compound of formula (I) is split off; n an oligosilazane-containing condensation product obtained according to this method; a method for production of a substrate coated or infiltrated with a ceramic-like material, comprising the following steps: n coating or infiltration of the substrate with a solution of the aforementioned oligosilazane-containing condensation product, evaporation of the product and curing of the oligosilazane-containing condensation product, n as well as a coated or infiltrated substrate obtained according to this method.

    专利号:US-9018387-B2
    优先权日:2010-06-11
    标 题:Complexes of imidazole ligands
    发明人:NORMAN JOHN ANTHONY THOMAS; PEREZ MELANIE K; LEI XINJIAN; SPENCE DANIEL P; IVANOV SERGEI VLADIMIROVICH; BAILEY III WADE HAMPTON
    权利人:NORMAN JOHN ANTHONY THOMAS; PEREZ MELANIE K; LEI XINJIAN; SPENCE DANIEL P; IVANOV SERGEI VLADIMIROVICH; BAILEY III WADE HAMPTON; AIR PROD & CHEM
    摘要:Metal imidazolate complexes are described where imidazoles ligands functionalized with bulky groups and their anionic counterpart, i.e., imidazolates are described. Compounds comprising one or more such polyalkylated imidazolate anions coordinated to a metal or more than one metal, selected from the group consisting of alkali metals, transition metals, lanthanide metals, actinide metals, main group metals, including the chalcogenides, are contemplated. Alternatively, multiple different imidazole anions, in addition to other different anions, can be coordinated to metals to make new complexes. The synthesis of novel compounds and their use to form thin metal containing films is also contemplated.

    专利号:US-5597935-A
    优先权日:1994-06-01
    标题 :Synthesis of ansa-metallocene catalysts
    发明人:JORDAN RICHARD F; DIAMOND GARY M
    权利人:UNIV IOWA RES FOUND
    摘要:A process of preparing in high yield ansa-metallocene complexes and rac ansa-metallocene complexes by reacting an ansa-bis-cyclopentadiene compound with a metal amide complex.
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    合成参考文献


    摘要:Ipaktschi, J.; Saidi, M. R., Science of Synthesis Knowledge Updates, (2012) 4, 459.
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