CAS: 15112-89-7; N,N,N',N',N'',N''-Hexamethylsilanetriamine

相似化合物

1624-01-7 13307-05-6

上下游产品

dimethyl amine tris(dimethylamino)chlorosilane tert.-butyl lithium sec.-butyllithiumbenzoic acid ethyl ester Tris (diethylaminoxy) silane silica gel

二甲胺置于四氯化硅,Lithium Aluminium Tetrahydride,Sodium Hydride体系中,化学反应 12.0H,以992 G的收率获得三(二甲胺基)硅烷
参考文献:트리스(알킬아미노)실란의 제조 방법
标题:트리스(알킬아미노)실란의 제조 방법
摘要:本发明涉及一种制备三(烷基氨基)硅烷的方法,包括以下步骤:(A)将化学式为rrnh的胺和化学式为sihx的卤代硅烷(其中,R和r分别独立表示1至6个直链,支链或环烷基,N为0或1,X为氟,氯,溴或碘,并且在步骤(A)中必须包括n=0的化合物)反应;以及(B)将步骤(A)的产物中的三(烷基氨基)硅烷与金属氢化合物反应,转化为三(烷基氨基)硅烷的步骤.本发明通过还原胺和卤代硅烷反应生成的三(烷基氨基)硅烷中间体为金属氢化合物,从而高产率地获得三(烷基氨基)硅烷,并且可以轻松去除生成的烷基胺盐酸盐,从而将最终产物中的杂质含量降至ppb以下.

专利信息

专利号:US-2025197431-A1
优先权日:2023-12-15
标 题:Methods and systems for forming a layer comprising silicon and composition and synthesis of silicon precursor
发明人：ROMERO PATRICIO EDUARDO; VERVUURT RENÉ HENRICUS JOZEF; DEZELAH CHARLES; PORE VILJAMI J
权利人:ASM IP HOLDING BV
摘要:Disclosed are methods and systems for forming a silicon-containing layer on a substrate. Further disclosed are composition and synthesis of silicon-containing precursor. The methods for forming a silicon-containing layer comprise executing a plurality of deposition cycles. A deposition cycle comprises a first precursor pulse that comprises exposing the substrate to a first precursor. The first precursor comprises a molecule comprising a P—Si bond. A deposition cycle further comprises a plasma pulse that comprises exposing the substrate to a plasma treatment. The plasma treatment comprises generating a plasma.

专利号:US-4730074-A
优先权日:1986-12-31
标 题 :Vapor phase alcoholysis of aminosilanes and carbamatosilanes
发明人：LEWIS KENRICK M; MENDICINO FRANK D; CHU NAN S
权利人:UNION CARBIDE CORP
摘要:A vapor phase process for the synthesis of alkoxysilanes of the general formula HSi(OR'') x (R') 3-x which comprises reacting n (a) a silane of the general formula n n HSi(NRR').sub.x (R').sub.3-x n n wherein R, R' and R' are individually hydrogen or an aryl or alkyl group optionally containing unsaturation, each having from one to eight carbon atoms inclusive, and where R' may also be an alkoxy or carbamato group and where x has a value of from one to three; with n (b) an alcohol of the general formula n n R''OH n n wherein R'' is an aryl group, or an alkyl group optionally containing unsaturation, each having from one to twenty carbon atoms inclusive and optionally substituted said reaction taking place in the presence of n (c) a catalyst n in which both the silane and the alcohol are present in gaseous form in a stoichiometric ratio of 0.4 to 1.05 moles of alcohol per mole of silicon-nitrogen bonds and where said catalyst is present in an amount from 0.01 to 10 mole percent of the silicon-nitrogen bonds.

专利号:US-2024419081-A1
优先权日:2023-06-13
标 题 :Method to reduce defects post-sequential infiltration synthesis
发明人：ZHOU LIN; ALVA GABRIELA; HUANG ZHIYU; LIN YUNG-CHEN; LANG CHI-I
权利人:APPLIED MATERIALS INC
摘要:Embodiments discloses herein describe methods for treating a substrate. In one example, a method of treating a layer of a film stack includes pre-treating a surface of an underlayer of a film stack formed on a substrate and forming a metal oxide in a photoresist layer of the film stack by heating a methyl-containing material in a processing environment proximate a film stack. The film stack includes the photoresist layer disposed on top of and in contact with an underlayer, and the underlayer disposed on top of a substrate. The metal oxide implanted photoresist later is then etched.

专利号:US-4345088-A
优先权日:1981-03-31
标 题:Preparation of alkoxyaminohydridosilanes
发明人：VICK STEVEN C; KANNER BERNARD
权利人:UNION CARBIDE CORP
摘要:Novel compounds of the formula ##STR1## are produced by reacting tris(dialkylamino)hydridosilanes with alkanols under specified conditions. The novel compounds are useful as analytical tools, as coupling agents, and in organic synthesis.

专利号:US-4668812-A
优先权日:1985-12-31
标 题 :Process for the preparation of olefinic silanes and siloxanes
发明人：QUIRK JENNIFER M; KANNER BERNARD
权利人:UNION CARBIDE CORP
摘要:A novel synthesis for silanes and siloxanes containing olefinic bonds wherein an aminosilane, siloxane alkoxysilane or alkylalkoxysilane and an olefin undergo a dehydrocondensation in the presence of a rhodium or ruthenium catalyst.

专利号:WO-2025129004-A1
优先权日:2023-12-15
标题:Methods and systems for forming a layer comprising silicon and composition and synthesis of silicon precursor